Instrumentation for Measurement of the Energy Distribution of the RF Implanter

Abstract

A microbeam production using the RF implanter at PEFP is in progress for research in material science. For this purpose, the energy spread of the beam less than 1% is required. A beam focusing system with a triplet quardrupole has been adopted. In order to measure the energy spread, we have developed a simple analyzing system using the disperse power of a deflecting magnet in the transport line. The instruments have been designed and installed to the beam diagnostic station which is located image position of the deflecting magnet system. Detailed work will be presented in this paper.